Electrical Plasma Diagnostic Instruments

The Impedans range of electrical plasma diagnostic instruments represent the forefront of
advanced diagnostics for process control and characterisation of low pressure plasmas.

The true power and value of these systems lies in the automatic application of complex
analysis algorithms and the way in which plasma parameters are subsequently presented and
displayed in a meaningful way and without requiring in-depth knowledge from the operator.

Our products deliver comprehensive characterisation and control in;

- PECVD
- Etch
- PVD (DC/Pulsed Magnetron/HIPIMS)
- Plasma Polymerisation & Surface Modification
- Ion Beam Analysis

Semion800, Retarding Field Ion Energy Analyser & Ion Flux Probe:

The Semion 800 is a retarding field ion energy analyser for the measurement of ion fluxes and ion energy at the surface in a wide range of plasma systems. It can perform both measurements equally on grounded or biased surfaces.

Semion HV 2500, Retarding Field Ion Energy Analyser & Ion Flux Probe:

The Semion HV 2500 is a high energy range retarding field ion energy analyser for the measurement of ion fluxes and ion energy at the surface in a wide range of plasma systems. It can perform both measurements equally on grounded or biased surfaces.

Semion pDC, Retarding Field Ion Energy Analyser & Ion Flux Probe:

The Semion Pulsed DC is a high energy range retarding field ion energy analyser for time resolved measurement of ion fluxes and ion energy at the surface in a wide range of plasma systems. It can perform both measurements equally on grounded or biased surfaces.

Semion Spatial, Retarding Field Ion Energy Analyser & Ion Flux Probe:

The Semion Spatial Retarding Field Energy Analyser measures the spatial profile of ion energies and ion flux at a surface in a plasma process. 13 RFEA's measure simultaneously.

Single Langmuir Probe:

The Impedans Single Langmuir Probe System is a simple to use, powerful diagnostic tool for measuring key plasma parameters in low and medium pressure plasma discharges.

Langmuir Double Probe:

The Impedans Langmuir DoubleProbe System provides a powerful diagnostic for measuring key plasma parameters in low and medium pressure discharges without requiring the current to be returned to ground.

Langmuir Plato Probe for Deposition Plasmas:

The Impedans Langmuir Plato Probe utilises unique patented technology for reliable measurement of key parameters from plasma deposition systems, even when a thick insulating layer is deposited on the probe surface.

Langmuir Probe for Atmospheric Plasma | The Atmospherix Probe:

The Langmuir Atmospherix Probe measures key plasma parameters in low temperature atmospheric plasmas and arc plasmas.

RF Plasma Power Meter:

The Octiv Mono is a Precision Plasma RF Power Meter for monitoring power delivery to Plasma systems. It has a 1% true accuracy and is immune to harmonic interference. The Octiv Mono Plasma RF Power Meter is calibrated for 5 interchangeable fundamental RF frequencies.

Pulsed Plasma Impedance Monitor:

The Octiv Poly is a Precision Plasma Impedance Monitor capable of monitoring 5 fundamental frequencies simultaneously in pulsed plasma applications. The patented technology is frequency agile and ideal for time resolved measurements.

Plasma VI Probe:

The Octiv VI Probe is a single frequency RF plasma sensor with microsecond time resolution for pulsed plasmas.

Full Feature Plasma Impedance Analyser:

The Octiv Suite is a feature rich Plasma Impedance Analyser / Spectrum Analyser that provides uniquely detailed diagnostic information on plasma process conditions.