Electrical Plasma Diagnostic Instruments

The Impedans range of electrical plasma diagnostic instruments represent the forefront of
advanced diagnostics for process control and characterisation of low pressure plasmas.

The true power and value of these systems lies in the automatic application of complex
analysis algorithms and the way in which plasma parameters are subsequently presented and
displayed in a meaningful way and without requiring in-depth knowledge from the operator.

Our products deliver comprehensive characterisation and control in;

- PECVD
- Etch
- PVD (DC/Pulsed Magnetron/HIPIMS)
- Plasma Polymerisation & Surface Modification
- Ion Beam Analysis

Semion Retarding Field Ion Energy Analyzer & Ion Flux Analyzer for Plasma Characterization:

For in-situ measurement of;

- ion energy distribution (IEDF)
- ion flux
- ion current
- electron flux
- electron energy distribution (EEDF)

Langmuir Probes for Automated & Accurate Plasma Diagnostics:

ALP (Automated Langmuir Probe) Systems for plasma diagnostics. The most innovative Langmuir Probes for real time, accurate measurement of key plasma parameters such as EEDF, plasma potential and electron & ion densities.

Octiv Plasma Impedance Probe / VI Probe for Plasma Characterization:

The Octiv Single Frequency VI Impedance Probe measures the Voltage, Current, Phase, Harmonics, Real Power, Forward Power and Reflected Power of a plasma chamber RF source.