Retarding Field Ion Energy Analysers

Semion, Retarding Field Ion Energy Analyser & Ion Flux Probe

The Semion retarding field ion energy analyser measures;

- ion energy distribution (IEDF)
- ion flux
- ion current
- electron flux
- electron energy distribution (EEDF)

Semion™ is an ion energy analyser and ion flux probe for use on grounded, DC, or RF biased electrodes and in both pulsed (including HIPMS) and continuous wave plasmas. It does not require differential pumping and provides analysis of both Ion Energy Distribution and Ion Flux over a wide range of conditions and with a resolution of <1eV.

The high energy tail of the electron energy distribution function (EEDF) is also measured and comparison with Langmuir probe measurements shows exceptional agreement in the energy region where both devices overlap. Additionally, for the specific case of a sinusoidal radio-frequency driving signal applied to the electrode, the analyzer is capable of clearly resolving between ions with different mass.

NEW!

Specifically designed for heavily depositing plasmas or aggressive etch plasmas, the new disposable button probe is the first user serviceable RFEA. Once the probe has become heavily contaminated, it is removed from the holder and simply replaced with a new, disposable probe.

Semion^TM Ion Energy Analyser Applications:

The Semion™ retarding field ion energy analyser finds many applications in research and industry.
Beam quality can be monitored in sputtering systems, and bimodal ion energy distributions may be observed in RF biased systems.

Time resolved measurements for pulsed DC applications (e.g. HIPIMS) are effortless by synchronising the Semion™ acquisition system with the source generator.

Example Data:

IED’s with 2 MHz RF bias at various potentials. Discharge pressure = 2mTorr:	Time Resolved IEDF:

Semion Retarding Field Ion Energy Analyser
Probe Diameter	60mm
Holder Diameter	70mm, 100mm, 300mm, custom on request
Holder Thickness	5mm
Mounting	Probe mounted flush with holder
Flange Type	KF40/CF40/ To Order
Substrate Holder to Chamber Wall	300mm to 3m/ To Order
Ion Current	2mA DC Max
Ion Flux	0.1 to 20 mA/cm²
Pulsed Plasmas	up to 500kHz, with 44nsec resolution (Semion pDC model)
Ion Energy Range	0-800eV (Semion 800)or 0-2500eV (Semion HV-2500)
IEDF Resolution	+/- 1eV nominal
Materials	Aluminium/anodised aluminium/To Order

Further Information

icon Impedans Semion RFEA - Brochure

icon EEDF Tail Measurement with Semion RFEA (222.59 kB)

icon Time Resolved Ion Flux and Energy (165.33 kB)

You can also find more references to recently published work in our links section.

For additional information, to request a quotation please contact us

SemionTM Ion Energy Analyser Applications:

Semion Retarding Field Ion Energy Analyser

Further Information

Semion^TM Ion Energy Analyser Applications: