RF Plasma Power Meter

The Octiv Mono is a Precision Plasma RF Power Meter for monitoring power delivery to Plasma systems. It has a 1% true accuracy and is immune to harmonic interference. The Octiv Mono Plasma RF Power Meter is calibrated for 5 interchangeable fundamental RF frequencies.

The Octiv Mono plasma RF Power Meter is calibrated for 5 interchangeable frequencies, removing the need for multiple power sensors and providing a one-sensor-fits-all solution for RF Plasma. It is one of the most advanced and trusted plasma RF Power Meters on the market.

RF Plasma Power Meter

The Octiv Mono is a precision plasma RF Power Meter used widely in laboratories and industry. The Octiv Mono operates to 1% true accuracy, is NIST traceable and is immune to harmonics, making it the most trusted plasma RF Power Meter for applications such as semiconductor manufacturing.

It takes the confusion out of choosing a plasma RF Power Meter and reduces your cost by providing a single sensor solution covering the full power and frequency range needed for most applications. The Octiv Mono provides a choice of five standard frequency ranges.

The Octiv Mono plasma RF Power Meter helps solve issues such as poor production yields, tool matching, fault detection and classification. It helps to define exact process windows and determines the health of power sub-systems. It also helps to determine process run to run stability and gives the user the confidence to trust the accuracy of the most complex process input, plasma RF power delivery.

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