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The Octiv Single Frequency VI Impedance Probe measures the Voltage, Current, Phase, Harmonics, Real Power, Forward Power and Reflected Power of a plasma chamber RF source.
Octiv is a single frequency, in-line RF Plasma VI Probe / Impedance Probe. The probe contains an RF VI sensor and high speed data acquisition system, utilising an ultra high-speed digital Fourier Transform for high accuracy measurement of fundamental RF voltage, current and phase. The Octiv probe is housed in a single, compact enclosure, and is easily installed on all high power RF equipment encountered in the laboratory or industrial environment. A USB connection provides power and data access to the sensor. An adaptor kit can be supplied with the probe to enable connection with standard RF equipment.
Octiv VI Probe / Impedance Probe Measures:
- Voltage, Current, Phase
- Real, Forward, Reflected Power
- Impedance
- Harmonic Components
- Pulsed RF measurement with time resolution of 1usec from 10Hz - 350kHz NEW!
Octiv VI Probe / Impedance Probe Outputs:- Parameters in Meter View
- Smith Chart
- Harmonic Chart
- Time Trend data
Download Octiv Brochure:  Impedans Octiv VI Probe - Brochure
The integrated sensor design means an end to having to pair a sensor head with it’s acquisition unit, and no more trailing cables between sensor head and electronic unit. Calibration data is stored on-board to ensure that each sensor is optimised for optimum accuracy.
A single USB connection is provided to download data from the sensor, and provide power to the sensor unit. Application software is provided which displays the required RF parameters in real-time. Harmonics information is also available to the user. |  |
The sensor system is suitable for one-off installations or with an adaptor kit it for use as a portable instrument.
The Octiv Software application provides and easy to use interface for controlling the sensor and displaying data. A comprehensive Application VI Probe / Impedance Probe Programmers Interface (API) is provided with the sensor to facilitate integration with customer applications and automated environments.
Octiv VI Probe / Impedance Probe Installation
Octiv VI Probe / Plasma Impedance Probe |
| Power
| 2.5kW (sensors also available for higher powers up to and >5kW)
| | Frequency | 13.56MHz +/-0.5MHz (sensors also available in the range 400kHz - 160MHz) | Voltage
| 0-3000 Vrms
| Current
| 0-20 Arms
| Phase
| -90o to +90o
| Resolution (V/I/Phase)
| +/-0.25V / +/-5mA / +/-0.01o
| Accuracy (V/I/Phase)
| +/-1%
| Sample rate
| 1-10Hz | Sensor impedance
| 50 Ohms
| Insertion loss
| 0.05dB | Size
| 70 x 70 x 70 mm
| Weight
| 400g |
Related Products: ALP Langmuir Probe, Semion Retarding Field Energy Analyser, Custom Vacuum Systems For additional information, to request a quotation, or for a live online demonstration please contact us
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