The Octiv Single Frequency VI Impedance Probe measures the Voltage, Current, Phase, Harmonics, Real Power, Forward Power and Reflected Power of a plasma chamber RF source.

Octiv is a single frequency, in-line RF Plasma VI Impedance Probe. The probe contains an RF VI sensor and high speed data acquisition system, utilising an ultra high-speed digital Fourier Transform for high accuracy measurement of fundamental RF voltage, current and phase.

The Octiv probe is housed in a single, compact enclosure, and is easily installed on all high power RF equipment encountered in the laboratory or industrial environment. A USB connection provides power and data access to the sensor. An adaptor kit can be supplied with the probe to enable connection with standard RF equipment.

Measure

• Voltage, Current, Phase
• Real, Forward, Reflected Power
• Impedance
• Harmonic Components

 Display

• Parameters in Meter View
• Smith Chart
• Harmonic Chart
• Time Trend data

Download Octiv Brochure:  Octiv VI Probe System Brochure (701.23 kB)

The integrated sensor design means an end to having to pair a sensor head with it’s acquisition unit, and no more trailing cables between sensor head and electronic unit. Calibration data is stored on-board to ensure that each sensor is optimised for optimum accuracy. A single USB connection is provided to download data from the sensor, and provide power to the sensor unit. Application software is provided which displays the required RF parameters in real-time. Harmonics information is also available to the user.

The sensor system is suitable for one-off installations or with an adaptor kit it for use as a portable instrument.

The Octiv Software application provides and easy to use interface for controlling the sensor and displaying data. A comprehensive Application Programmers Interface (API) is provided with the sensor to facilitate integration with customer applications and automated environments.

Octiv VI Probe Installation

Related Products: ALP Langmuir Probe, Semion Retarding Field Energy Analyser, Custom Vacuum Systems

For additional information, to request a quotation, or for a live online demonstration please contact us