| Pulsed Plasma Diagnostics |
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Pulsed Plasmas Sub-microsecond resolution of pulsed plasmas. Impedans' range of electrical plasma diagnostic instruments offer the highest specifications for time resolved plasma diagnostics of any commercial plasma diagnostic instruments. Semion™ Semion™ is an ion energy analyser and ion flux probe for use on grounded, DC, or RF biased electrodes and in both pulsed (including HIPMS) and continuous wave plasmas. It does not require differential pumping and provides analysis of both Ion Energy Distribution and Ion Flux over a wide range of conditions and with a resolution of <1eV. The image to the right shows the time resolved IEDF for a 350kHz pulsed DC plasma. ALP™ ALP™ is the industry's highest specification Langmuir probe with a time resolution of just 12.5nsec using our Advanced Box Car mode of operation. It is fully compatible with DC, pDC, RF, pRF and microwave plasmas and configured for both static measurements or spatially resolved measurements with the optional automated z-drive. The ALP™ is now also available in a double probe configuration, another first from Impedans. The image to the right shows a double probe trace. OCTIV™ The Octiv™ Single Frequency VI Probe measures the Voltage, Current, Phase, Harmonics, Real Power, Forward Power and Reflected Power of a plasma chamber RF source. The Octiv Pulsed RF VI Probe facilitates analysis of the instantaneous impedance and other plasma parameters over a pulse period in a pulsed RF plasma system. The probe is mounted post-match to deliver key electrical measurements with a time resolution of 1uS! The image to the right shows instantaneous plasma impedance measurements. |
