Plasma Surface Modification, Plasma Cleaning & Plasma Diagnostics

External  links and resources to a wide range of plasma surface modification information.


Useful Web Resources

Plasma Surface Modification
Comprehensive reference/text book from Prof. Riccardo D’Agostino

Institute of Physics Plasma Physics Group 
The IoP’s plasma physics group pages.

Plasma Gate
Award winning site with a wide variety of useful links.

Dublin City University/Queen’s University of Belfast Online Graduate Course
Online graduate course in plasma plasma and vacuum technology.



Organisations

Institute of Physics Plasma Physics Group
The IoP’s plasma physics group pages.

Institute of Physics Vacuum Group
The IoP’s vacuum group pages.

Institute of Physics Thin Films and Surfaces Group
The IoP’s thin films and surfaces group pages.

International Union for Vacuum Science, Techniques and Applications (IUVSTA)
Comprehensive vacuum related topics from this union of national member societies.

The American Vacuum Society (AVS)
Site contains many useful educational resources.

Science Direct
On-line information source for scientific, technical and medical research.



Journals

Plasma Processes & Polymers

Plasma Sources Science and Technology

Journal of Plasma Physics

Journal of Vacuum Science and Technology, A & B


Downloads & Published Work:

Tailored ion energy distributions at an rf-biased plasma electrode X V Qin et al 2010 Plasma Sources Sci. Technol.19, 065018 (6pp)

Fundamental aspects of substrate biasing: ion velocity distributions and nonlinear effects T Baloniak et al 2010 J. Phys. D: Appl. Phys. 43 335201

Comparison of plasma parameters determined with a Langmuir probe and with a retarding field energy analyzer D Gahan et al 2008 Plasma Sources Sci. Technol.17, 035026 (9pp) 

Ion energy distributions at a capacitively and directly coupled electrode immersed in a plasma generated by a remote source C Hayden et al 2009 Plasma Sources Sci. Technol 18, 18 025018 (11pp)

Retarding field analyzer for ion energy distribution measurements at a radio-frequency biased electrode Rev. Sci. Instrum. 79, 033502 (2008)

Retarding field analyzer for ion energy distribution measurement through a radio-frequency or pulse biased sheath Plasma Processes and Polymers (2008)

Electrical characterisation of a capacitive rf plasma sheath Rev. Sci. Instrum. 78 016102 (2007)

Effect of dc bias control on the power absorption in low-pressure, radio frequency capacitive sheaths J. Appl. Phys. 101, 023303 (2007)

Collisionless electron power absorption in capacitive radio-frequency plasma sheaths J. Appl. Phys. 100, 043304 (2006)

Langmuir probe technique for plasma parameter measurement in a medium density discharge Rev. Sci. Instrum. 57, 2210 (1986)



icon Time Resolved Ion Flux and Energy from Pulsed Plasmas (165.33 kB)

icon EEDF Tail Measurement with the Semion RFEA (222.59 kB)

icon Plasma Measurement with the ALP - Automated Langmuir Probe (426.21 kB)

icon Introduction to Plasma Surface Modification (3.45 MB)

icon Ultra-Fine Plasma Cleaning (134.34 kB)

 
Copyright © 2012 Henniker Scientific. All Rights Reserved.