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Plasma Surface Modification, Plasma Cleaning & Plasma Diagnostics |
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External links and resources to a wide range of plasma surface modification information.
Useful Web Resources Plasma Surface Modification Comprehensive reference/text book from Prof. Riccardo D’Agostino Institute of Physics Plasma Physics Group The IoP’s plasma physics group pages. Plasma Gate Award winning site with a wide variety of useful links. Dublin City University/Queen’s University of Belfast Online Graduate Course Online graduate course in plasma plasma and vacuum technology.
Organisations Institute of Physics Plasma Physics Group The IoP’s plasma physics group pages. Institute of Physics Vacuum Group The IoP’s vacuum group pages. Institute of Physics Thin Films and Surfaces Group The IoP’s thin films and surfaces group pages. International Union for Vacuum Science, Techniques and Applications (IUVSTA) Comprehensive vacuum related topics from this union of national member societies. The American Vacuum Society (AVS) Site contains many useful educational resources. Science Direct On-line information source for scientific, technical and medical research.
Journals Plasma Processes & Polymers Plasma Sources Science and Technology Journal of Plasma Physics Journal of Vacuum Science and Technology, A & B
Downloads & Published Work: Tailored ion energy distributions at an rf-biased plasma electrode X V Qin et al 2010 Plasma Sources Sci. Technol.19, 065018 (6pp)
Fundamental aspects of substrate biasing: ion velocity distributions and nonlinear effects T Baloniak et al 2010 J. Phys. D: Appl. Phys. 43 335201
Comparison of plasma parameters determined with a Langmuir probe and with a retarding field energy analyzer D Gahan et al 2008 Plasma Sources Sci. Technol.17, 035026 (9pp) Ion energy distributions at a capacitively and directly coupled electrode immersed in a plasma generated by a remote source C Hayden et al 2009 Plasma Sources Sci. Technol 18, 18 025018 (11pp) Retarding field analyzer for ion energy distribution measurements at a radio-frequency biased electrode Rev. Sci. Instrum. 79, 033502 (2008) Retarding field analyzer for ion energy distribution measurement through a radio-frequency or pulse biased sheath Plasma Processes and Polymers (2008) Electrical characterisation of a capacitive rf plasma sheath Rev. Sci. Instrum. 78 016102 (2007) Effect of dc bias control on the power absorption in low-pressure, radio frequency capacitive sheaths J. Appl. Phys. 101, 023303 (2007) Collisionless electron power absorption in capacitive radio-frequency plasma sheaths J. Appl. Phys. 100, 043304 (2006) Langmuir probe technique for plasma parameter measurement in a medium density discharge Rev. Sci. Instrum. 57, 2210 (1986)
Time Resolved Ion Flux and Energy from Pulsed Plasmas (165.33 kB)
EEDF Tail Measurement with the Semion RFEA (222.59 kB)
Plasma Measurement with the ALP - Automated Langmuir Probe (426.21 kB)
Introduction to Plasma Surface Modification (3.45 MB)
Ultra-Fine Plasma Cleaning (134.34 kB)
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