Accurate, precise residual gas analysis identification & tracking in chamber clean, passivation sequences and deposition steps for various CVD processes.

The Vision 1000-C consists of “smart head” residual gas analyser technology with a closed ion source and close-coupled inlet. This state-of-art residual gas analyser technology is integrated with Process Eye control platform, a recipe based, user-configurable software program. The combination of closed ion source and automated inlet allows seamless monitoring of the complete CVD process cycle, from base vacuum to process pressures of up to 700 Torr. By maximising the ratio between CVD chamber gas signals and the residual gas background in the differentially pumped Vision 1000-C analyser housing, the closed ion source enables ppb-level detection for trace contaminants in the process gas.

Vision 1000-C Residual Gas Analyser for CVD: Technology CVD process compatible materials throughout Heated analyser housing Unibloc inlet valve Dual filament high conductance closed ion source Process Eye Professional control platform

Simultaneous Display/Wide Dynamic Range:	Unibloc Intelligent Inlet Valve:

Download Data Sheet:  Vision 1000C Data Sheet (330.97 kB)

We also have a simple Introduction to Mass Spectrometry that might be of interest and there are many more resources in our Links section.

For additional information on these services, if you have any questions, or to request a quotation, please contact us.