Vision 1000-C RGA: Residual Gas Analyzer for CVD Processes

Accurate, precise residual gas analysis identification & tracking in chamber clean, passivation sequences and deposition steps for various CVD processes.

The Vision 1000-C consists of “smart head” residual gas analyzer technology with a closed ion source and close-coupled inlet. This state-of-art residual gas analyzer technology is integrated with Process Eye control platform, a recipe based, user-configurable software program. The combination of closed ion source and automated inlet allows seamless monitoring of the complete CVD process cycle, from base vacuum to process pressures of up to 700 Torr. By maximizing the ratio between CVD chamber gas signals and the residual gas background in the differentially pumped Vision 1000-C analyzer housing, the closed ion source enables ppb-level detection for trace contaminants in the process gas.


Vision 1000-C Residual Gas Analyzer for CVD: Technology

  • CVD process compatible materials throughout
  • Heated analyzer housing
  • Unibloc inlet valve
  • Dual filament high conductance closed ion source
  • Process Eye Professional control platform
Vision 1000C CVD Residual Gas Analyzers 


Simultaneous Display/Wide Dynamic Range: Unibloc Intelligent Inlet Valve:
Residual Gas Analyzers Software Residual Gas Analyser Inlet, MKS Web-Enabled 1000C CVD 


Vision 1000-C CVD Process & Residual Gas Analyzers


Mass Range 1-300 amu
Detector Dual Faraday/SEM
Analyzer Double filter quadrupole
Inlet Pressure Ranges

1E-8 to 1E-3 Torr base range

0.1, 0.5, 1.5, 5, 10, 40, 100 or 700 Torr

Max Operating Pressure 1E-3 Torr at the inlet 
Min Detectable Partial Pressure <2E-11 Torr 
Min Detectable Concentration <200 ppb for non-interfering species
Stability Better than +/- 0.1 amu over 8 hours
Resolution Better than 10% valley throughout mass range


Download Data Sheet: icon Vision 1000C Residual Gas Analzers for CVD Data Sheet (330.97 kB)

We also have a simple Introduction to Mass Spectrometry that might be of interest and there are many more resources in our Links section.

For additional information on these services, if you have any questions, or to request a quotation, please contact us.

 
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