Intelligent, hands-free residual gas analyzers for PVD applications. Automated GO/NO-GO status based on ppb level detection of contaminants. Field proven routines will alarm on, and suggest causes for, common residual gas problems in PVD processes.

The Vision 1000-P represents a different concept in process monitoring, requiring minimum operator interaction or knowledge of residual gas analyzers. The Vision 1000-P consists of smart-head residual gas analyzer technology with a closed ion source and close-coupled inlet. This state-of-art residual gas analyzer technology is integrated with Process Eye Professional™ Control Platform, a recipe based, user-configurable software program. The technology advances incorporated in the Vision 1000-P residual gas analyzer provides users with simple, effective, process monitoring operation including; ppb level detection of contaminant gases during PVD processes, faster PM recovery through vacuum analysis, constant baseline vacuum troubleshooting, single push button operation to start recipes.

Vision 1000-P PVD Residual Gas Analyzer Technology: PVD process compatible materials throughout Heated analyser housing Unibloc inlet valve Dual filament high conductance closed ion source Process Eye Professional control platform

Wide Dynamic Range & Intergration of External Power Supply Signals:	Unibloc Intelligent Inlet Valve:

Related products: deposition systems, Langmuir probe, ion energy analyser

Download Data Sheet: Vision 1000P PVD Residual Gas Analyzer Data Sheet (298.12 kB)

We also have a simple Introduction to Mass Spectrometry that might be of interest and there are many more resources in our Links section.

For additional information on these services, if you have any questions, or to request a quotation, please contact us.