Application specific residual gas analysers for PVD. Automated GO/NO-GO status based on ppb level detection of contaminants. Field proven routines will alarm on, and suggest causes for, common residual gas problems in PVD processes.

The Vision 1000-P is an application specific residual gas analyser for PVD. It represents a different concept in PVD monitoring, requiring minimum operator interaction or knowledge of residual gas analysers. The Vision 1000-P consists of smart-head residual gas analyser technology with a closed ion source and close-coupled inlet. This state-of-art residual gas analyser technology is integrated with Process Eye Professional™ Control Platform, a recipe based, user-configurable software program. The technology advances incorporated in the Vision 1000-P residual gas analyser provides users with simple, effective, process monitoring operation including; ppb level detection of contaminant gases during PVD processes, faster PM recovery through vacuum analysis, constant baseline vacuum troubleshooting, single push button operation to start recipes.

Vision 1000-P PVD Residual Gas Analyser Technology: PVD process compatible materials throughout Heated analyser housing Unibloc inlet valve Dual filament high conductance closed ion source Process Eye Professional control platform

Wide Dynamic Range & Intergration of External Power Supply Signals:	Unibloc Intelligent Inlet Valve:

Related products: deposition systems, Langmuir probe, ion energy analyser

Download Data Sheet:  Vision 1000P Process Monitor Data Sheet (298.12 kB)

We also have a simple Introduction to Mass Spectrometry that might be of interest and there are many more resources in our Links section.

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