Vision 1000-B RGA: Residual Gas Analysers for General Vacuum Diagnostics

Vision 1000-B residual gas analyser is the analysers of choice for vacuum diagnostics, chamber pumpdown and baseline characteristics.

The Vision 1000-B residual gas analyser is an application-specific residual gas analyser designed to monitor vacuum pumpdown, baseline, and leakback conditions in thin film processing and to alert of conditions that can negatively impact processing conditions. In addition, the Vision 1000-B residual gas analyser provides the information required to optimise vacuum quality with both residual gas monitoring (including air and water), and contaminant monitoring (including hydrocarbons).

Vision 1000-B Residual Gas Analyser Technology:

Contamination resistant double filter quadrupole analyser
Heated analyser housing
Pneumatic isolation valve
Dual filament open ion source
Process Eye control platform

Residual Gas Analyser for Vacuum Chamber Diagnostics

Simultaneous Display/Wide Dynamic Range:	Analyser Schematic:

Vision 1000-B Residual Gas Analyser
Mass Range	1-100 amu standard, up to 300 amu optional
Detector	Dual Faraday/SEM
Analyser	Double filter quadrupole mass spectrometer
Max Operating Pressure	1E-4 Torr
Min Detectable Partial Pressure	2E-11 Torr (Far), 5E-14 Torr (SEM)
Stability	Better than +/- 0.1 amu over 8 hours
Resolution	Better than 10% valley throughout mass range
Ion Source	Open, radial, twin filament
Vacuum Hardware	Bakeout jacket (200 degC), pneumatic isolation valve

Download Data Sheet: icon Vision 1000B Data Sheet (225.55 kB)

We also have a simple Introduction to Mass Spectrometry that might be of interest and there are many more resources in our Links section.

For additional information on these services, if you have any questions, or to request a quotation, please contact us.