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Advanced yet economical R&D MBE systems for a wide variety of materials growth applications.
Research OLED MBE System Our research MBE tools are the most economical and versatile systems currently available for R&D and product development. With outstanding levels of automation and sophistication, they deliver results previously only available from systems that are two or three times the price. The example below is a customised multi-chamber MBE system dedicated for the preparation and investigation of organic films (OLEDs). The XPS analyser and FT-IR unit are third party integrations. Other than these items, every other component, chamber, transfer mechanism, instrument, elctronics unit and software is wholly manufactured by us. 
| | | Description
Multi-chamber system designed around a central radial distribution chamber with attached analytical chambers and auxiliary chambers to fulfill the demands of sample transport under true UHV conditions (pressure lower than 1E-10 mbar). The importance of a very fast and reliable sample transfer is needed because several of the prepared films can only exist at low temperatures. The base pressure in the analytical chambers is < 1E-10 mbar
Specification
- Multi-technique analytical chamber integrates different surface analysis methods; X-ray Photoelectron Spectroscopy (XPS), Inverse Photoelectron Spectroscopy (IPES), Ultraviolet Photoelectron Spectroscopy (UPS) and Electron Loss Spectroscopy (EELS).
- Sample positioning is via a stable, high precision, 4 axis manipulator. The sample receiving station is equipped with a LN2 cryostat that allows temperature variation over the range -180°C to 1000°C (dependent on sample holder used).
- The Chamber is made from mu-metal and is equipped with a hemispherical analyzer and x-ray source, UV source and low energy electron source. The flexible design allows for easy modification to meet future scientific demands
- Variable temperature STM/AFM chamber is accessible through a re-orientation chamber directly connected to the distribution chamber. A special sample holder was designed to carry the STM-holder and to allow heating, cooling and temperature measurement of the samples in all of the other chambers
- Chamber for Infrared Spectroscopy (FT-IR) with commercial IR spectrometer that can be used also in a standalone application. The sample can be heated and cooled during the measurement and the chamber can be equipped with an electron beam evaporator for in-situ sample preparation.
- Three level preparation chamber, equipped with LEED, TDS, ion source, electron beam evaporator, Knudsen cells, and many ports which can be used in the future for preparation or evaporation devices.
- Single level preparation chamber equipped with surface conductivity measurement, ion source and several ports which can be used in the future for other preparation devices.
- Load lock chamber prepared with detachable glove box for either simple sample loading or sample preparation under reduced oxygen and water atmosphere.
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| | | | | The MBE Control Platform is our dedicated, easy to use software package for long term, stable control of MBE growth processes.
Prevac MBE application includes:
- PLC control module for controlling water cooling circuit, air flush circuit and evaporator shutter mechanisms
- Quartz balance module for film thickness measurement and deposition rate monitoring
- Sample manipulator module for precision control of sample position
- Sample shutter manipulator module
- Evaporator shutter process control editor which allows the user to define shutter open/close time with 1 ms resolution
- Power supply modules Our MBE systems deliver production grade material quality together with system design flexibility. Systems are delivered to exact customer requirements and include options to integrate ellipsometry, pyrometry, residual gas analysers and reflectance spectroscopy techniques.
Features:
• Full graphics user interface of the complete tool
• Save and recall of all device parameters and settings
• Various user and administrator access levels
• Continuous and discreet monitoring of selected parameters or measured values
• Continuous and discreet recording of selected parameters or measured values
• Graphical interpretation of measured values or selected parameters | Related products: e-beam evapourator, Knudsen cells, quartz deposition rate monitor, resistive/e-beam heater power supplies |
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