Vacuum and UHV Bakeout Equipment

Halogen lamps and externally mounted vacuum and UHV bakeout equipment, tents & jackets.

We provide a comprehensive range of vacuum and UHV bakeout options to suit most applications. The range covers both external and internal bakeout solutions and our bakeout devices are under full microprocessor and software control.

External Bakeout Sets

The Bakeout Sets are mounted outside the chamber on a frame table below the chamber and apply heat  to the air side surfaces only. They are augmented as appropriate by a shaped insulating tent built around the system. Heat transfer is mostly conduction. Tents are made of double isolated aluminium covered glass fiber material (aluminium side visible, no contact to support material) with overlaps for closing the tents using 100 mm clamps. Max contact temperature of the tents is 260°C

The set contains:
• Resistive coil heater
• Fan
• Heater tray
• Shield for heater
• Shield for fan engine

Vacuum UHV External Bakeout Heater Set UHV Vacuum Bakeout Tents
Bakeout Heater Set
Example Tent Enclosure
  
Internal Halogen Lamp Bakeout Heater Sets
 
The Halogen Lamp Heaters act both as bakeout heaters and sample heaters. They are mounted inside a vacuum chamber to raise the temperature of substrates. They clean nearly all molecules adhering to the substrate’s surface through electron excitation and molecular vibration. Lamp heaters save both time and power since the heat radiates directly to the critical surfaces.

 
Halogen lamp UHV Vacuum Bakeout Heaters
Halogen Lamp for Internal Bakeout  
  
Bakeout Control
 

The BCU13 Bakeout Control Unit is a microprocessor controlled device for independent control of two heating zones of a vacuum system. The single unit has two independently controlled and regulated 10kW heater power supplies with independent timers.

An additional option allows the customer to independently control other non-regulated heaters such as those used for ion pumps.

The unit is also fully software controlled and web-enabled so that it can be operated over any network, including the internet.

 

 UHV Vacuum Bakeout Dual Zone Controller UHV Vacuum Bakeout Control Software
 BCU13 Bakeout Control Unit
 Bakeout Control Software
  
Further details of our vacuum bakeout sets are available in our vacuum accessories catalogue which can be downloaded here; icon Vacuum Accessories.
 
Copyright © 2010 Henniker Scientific. All Rights Reserved.