High rigidity, low cost UHV XYZ mini manipulators.

The XYZ Vacuum Manipulator is a precision, high rigidity UHV specimen translator having X, Y and Z motions. The standard mounting flange is DN 63CF and the standard travelling flange is DN 40CF. All three axes are merged in one miniature stage that delivers outstanding performance at exceptionally low prices. The translators can work in any orientation.

Application
The XYZ Vacuum Manipulator has been designed for ease and convenience of use. X and Y movement is +/- 12,5 mm, depending on the accessories that are fitted. Z movement is 75-250 mm, depending on the application.

Additional information
The Z movement can be motorised providing 1um resolution in that axis.

XYZ Vacuum Manipulator Stages

XYZ Mini Manipulator Stage	XYZ Mini Manipulator Stage Schematic

XYZ Vacuum Manipulator Specifications
mounting flange	DN63CF or DN100CF
travelling flange	DN40CF
bakeout temperature	150 degC
position control	micrometer (XY)/handwheel (Z)
range of travel	+/- 12.5mm (XY)/75-200mm (Z)
resolution	0.05mm
repeatability	0.05mm
Details of our full range of vacuum manipulation solutions are available for downloaded here; Prevac Vacuum Manipulators