Multi-Technique Deposition
Multi-technique UHV deposition systems, uniquely designed with simple single chamber techniques or combinations of techniques in linear or cluster formation and with scope for future explansion.
- PLD systems and modules
- Sputtering chambers
- MBE growth chambers
- Metals, magnetic materials and organics
- Fully recipe driven with wide range of sample holder types, sizes and temperature ranges
- Able to incorporate a wide range of analytical techniques
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