Reproducible Compact Thin Film Deposition Systems.
PRIMS is an all-new compact yet feature-rich sputtering system for reproducible thin film deposition.
The sputter-down configuration features ports for three 2 inch magnetrons sputtering sources and the compact, turbomolecular-pumped process chamber delivers rapid pump down times. A manual throttle valve is included on the turbo pump and a full size chamber door facilitates easy target and sample changes. A dedicated quartz balance deposition rate monitor is included.
For more information on this product and our full range visit our dedicated Thin Film Deposition application pages.