All-new compact yet feature-rich sputtering system
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Reproducible Compact Thin Film Deposition Systems.
PRIMS is an all-new compact yet feature-rich sputtering system for reproducible thin film deposition.
The sputter-down configuration features ports for three 2 inch magnetrons sputtering sources and the compact, turbomolecular-pumped process chamber delivers rapid pump down times. A manual throttle valve is included on the turbo pump and a full size chamber door facilitates easy target and sample changes. A dedicated quartz balance deposition rate monitor is included.
For more information on this product and our full range visit our dedicated Thin Film Deposition application pages.
Watch the dedicated video on our youtube channel here
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