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Ion Gun for Depth Profiling


Ion Gun for Depth Profiling IS40E1

The IS 40E1 ion gun for depth profiling applications is a two lens, extractor type, focused, differentially pumped source. The ion gun is able to raster a 10 mm x 10 mm area of the surface at the recommended working distance.

It is particularly suitable for depth profiling in XPS, ISS and SIMS. The ion gun can be also used for sample surface cleaning.

 


Ion Gun Power Supply

The IS40-PS power supply drives the IS40E1 ion gun whose primary use is for depth profiling in AES/XPS and SIMS applications.

The IS40-PS power supply allows fine adjustment of the primary beam energy and ion density and of beam profile via adjustment of extractor, focus lens, deflection and positioning elements. The current status of each parameter is displayed on the large front panel LCD display. All settings can be stored and recalled automatically after unit switch on, or else manually adjusted. The unit also features a built in timer and automatic standby mode.

  • Henniker Scientific Ion Source for Depth Profiling
  • Henniker Scientific Ion Source for Depth Profiling with Wien Filter
  • Henniker Scientific Ion Source Power Supply
  • Henniker Scientific Ion Source for Depth Profiling
  • Henniker Scientific Ion Source for Depth Profiling with Wien Filter
  • Henniker Scientific Ion Source Power Supply

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Features

Features

  • Specially configured nose cone
  • Operation with inert (Ar) & reactive gases (O2, H2, hydrocarbons with reduced lifetime)
  • Continuously variable spot size
  • Extremely homogeneous crater/beam profile
  • Field replaceable filament
  • UHV gas inlet
  • UHV conditions maintained in chamber
  • Integrated scan and deflection unit

Options

  • Wien mass filter
  • Gas dosing system
  • Linear shift: 25, 50, 75, 100 mm
  • Differential pumping (2 stages)

 

Beam energy (E)

  0 keV - 5 keV, resolution 0.01 keV, ripple < 0.2 Vpp
Emission current (Ie) 0.01 mA - 10 mA, resolution 0.01 mA
Focus (1,2) voltage 0 - 5000 V, resolution 1 V, ripple < 0.2 Vpp
Extractor voltage (Ex) 60 - 100% of energy, resolution 0.1%, ripple < 0.2 Vpp
Beam position (Px, Py) -5 mm to 5 mm, resolution 0.01 mm
Scanning area (Δx, Δy) 10 mm x 10 mm, resolution 0.01 mm
Scanning speed (time/dot) 20 μs - 30 ms
Weight (approx.) 12 kg

info@henniker-scientific.com 
+44(0)1925 830 771