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Water Vapor Desorption Tools

Water Vapor Desorption Products

henniker scientific RBD instruments mini z light

UVC-based and IR-based water vapor desorption / oxidative hydrocarbon removal systems for vacuum chambers.

RBD's desorption products utilize shortwave IR, and UVC radiation to desorb layers of water vapor in vacuum chambers without the intense heat of IR or a radiant bake-out. Using UVC to desorb water vapor is ideal for chambers that have Viton O-ring seals, which pump down in the range of the low 10-6 to low 10-7 Torr. Benefits include faster pump down times and a lower ultimate vacuum.


The UVB uses UVC radiation to desorb water vapor without heat. The emitter extends into the vacuum chamber.

henniker scientific RBD instruments uvb 100 flange

Flange Mounting Options
The UVB-100 comes standard with 2.75 CF or NW40 (K150) KF mount.


The mini-Z is ideal for solving water vapor problems in compact vacuum chambers, mini ALD chambers, pressure cells and load locks.

henniker scientific RBD instruments mini z mounted

Remote Control Options

The mini-Z power supply is simple and easy to use and also comes with a remote ON/OFF option available if you want to operate the miniZ by a process controller or set point.

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