Water Vapor Desorption Products
UVC-based and IR-based water vapor desorption / oxidative hydrocarbon removal systems for vacuum chambers.
RBD's desorption products utilize shortwave IR, and UVC radiation to desorb layers of water vapor in vacuum chambers without the intense heat of IR or a radiant bake-out. Using UVC to desorb water vapor is ideal for chambers that have Viton O-ring seals, which pump down in the range of the low 10-6 to low 10-7 Torr. Benefits include faster pump down times and a lower ultimate vacuum.
The UVB uses UVC radiation to desorb water vapor without heat. The emitter extends into the vacuum chamber.
Flange Mounting Options
The UVB-100 comes standard with 2.75 CF or NW40 (K150) KF mount.
The mini-Z is ideal for solving water vapor problems in compact vacuum chambers, mini ALD chambers, pressure cells and load locks.
Remote Control Options
The mini-Z power supply is simple and easy to use and also comes with a remote ON/OFF option available if you want to operate the miniZ by a process controller or set point.
The UVB-100 increases your productivity by pumping out water vapor in vacuum systems more quickly, giving you more time for additional vacuum process runs or other tasks each day. It is ideal for O-ring sealed vacuum chambers in high humidity environments.
The UVB-100 system applies UVC radiation to the inside of vacuum chambers, which results in faster desorption of water vapor and decreased pump-down times. The system comprises the control (with key-lock mechanism), HV- and UHV-compatible UV emitter, and cables.
The emitter can be inserted into any available 2-3/4” flange. The emitter can also be adapted to other flange sizes.
- Easy to Use: Simply turn it on; no cables need to be removed and no blankets are necessary.
- Efficient: Water is desorbed more quickly so that you can get your work done sooner.
- Compatible: Ideal for large chambers and load locks with O-ring seals. Works with most HV and UHV systems.