Electron Beam Evaporator
Electron Beam Evaporator
The electron beam evaporator EBV 40A1 is designed for ultra-pure sub-monolayer and multilayer thin film growth by molecular beam epitaxy.
The precisely defined evaporant beam means highly uniform deposition on the sample, the deposition area being determined by the distance from the E-beam evaporator to the sample and the choice of one of the easily exchangeable exit apertures.
The electron beam evaporator EBV 40A1 is configured with a choice of a manual or automatic shutter. Custom insertion length 190 - 345 mm (other on request)
EBV40A-PS Power Supply
A key feature of the EBV40A is the integrated flux monitor. Evaporant flux is indirectly monitored via the measured ion current, providing accurate flux adjustment and faster deposition rate control. The ion collector is contained within the beam exit column. At a given electron emission current and beam energy, the measured ion flux measured is directly proportional to the flux of evaporated atoms. The EBV40A-PS is equipped with built-in PID controller which stabilizes evaporant flux at the desired level. The unit can be operated in AUTO mode (with ion flux control) or MANUAL mode (without ion flux control). The EBV40A-PS can be supplied as a full width 19” rack mounting unit (3U height) or free standing.
The unit is also fully software controlled and web-enabled so that it can be operated over any network, including the internet.
Only one communication interface can be chosen at time of order (please refer to table) but this can be easily changed in the future via simple rear-panel plugin connection modules, without ever having to access the internals of the unit.
Application
The EBV40A-PS power supply drives the EBV40A Electron Beam Evaporator for ultra-pure sub-monolayer and multilayer growth in MBE applications.
Software
A full dedicated software application or library module.
Request a quotation or further information
Other Features
Features
- Manual or electro-pneumatic shutter, integrated PID flux monitor
- W/Th-filament for evaporation from rod material or from small conductable crucible
- Wide range of exchangeable exit apertures
- Integral water cooling
- Suitable for various materials
- Unique high reliability design
- Extremely high power densities
Options
- Customised insertion length
- With or without integrated manual/electro-pneumatic shutter
- Linear shift
- Crucibles
Technical Data
Electron Beam Evaporator
|
Mounting Flange |
DN 40CF (rotatable) |
Temperature range (for evaporated materials) |
160°C – 2300°C (3300°C for molybdenum connector) |
Filament current |
typically 1.8 - 2.2 A, max 2.3 A |
Evaporating rod diameter |
2 mm standard (other on request), step 2 mm, wire feed 25 mm wire length 43 mm |
Water cooling (required) |
water flow: > 0.5 l/min., temperature: 20-30 °C, max pressure: 6 bar |
Exit aperture diameters |
set 1: ID 4, ID 6, ID 7.4 (standard) set 2: ID 10, ID 14, ID 19 |
Type of shutter |
manual or pneumatic |
Power |
- 50 W for high vapor pressure materials - up to 200 W for crucibles and thick wires |
Energy range |
1 – 1500 eV |
Cathode type |
thoriated tungsten |
Crucible type (option) |
Knudsen cell type made from: Mo, W, liner PBN, Al2O3 |
Crucibles volume |
0.07 ml |
Evaporated materials |
All typical materials according to crucible type |
Others |
Flux regulation via ion current incl. electrode, feedthrough, display unit and PID-regulator Rear-loading evaporant |
Insertion length |
min. 190 mm (other on request) OD: 34.8 mm |
Spot size |
Dependent on working distance (e.g. 6 mm for distance 25 mm - ID 4, 33 mm for distance 75 mm - ID 19) |
Working distance |
25 - 75 mm (optimum) |
Bakeout temperature |
up to 250°C |
Working pressure |
<10-5 mbar |
EBV40A-PS Power Supply
|
Supply Voltage |
110V or 230V, 50/60Hz |
Beam energy (Ueng) |
0 - 1500eV at max 200mA; resolution < 1V; ripple < 0,5PP |
Filament current (Ifil) |
0 - 7,5A, resolution < 0,1A, ripple < 0,05A |
Flux Icons Current Monitor (Flux) |
1mA, resolution 10nA |
Temperature monitor |
0 - 100°C, temperature of water-cooled copper cylinder |
Flux Current Regulator |
Flux current controlled with internal regulator |
Operating modes |
Auto/Manual |
Timer |
2 modes timer, 0s - 99h59m |
User Interface |
Large LCD graphics display. Functions keys and digital encoder |
Communication Interface* (option) |
RS232/485/422, USB, Bluetooth |
Dimensions [mm] |
483 x 133 x 380 (W x H x D), 19" rack mountable or stand alone |
Weight, approx |
12,5 kg |
* Only one comms interface can be used at any one time and is chosen at time of order. However, this may be swapped/interchanged with any other comms interface at any future date via simple rear panel plug and play swap, without having to access the internals of the unit.
Dimensions

Software
Electron Beam Evaporator Control

Description:
Electron Beam Evaporator Controller software extension for data acquisition and convenient control.
Features:
- Full access to device settings and parameters
- Easy visual device status preview
- Real time data acquisition
- Real time chart presentation for acquired data
- Real time data saving
- Export acquired data to common formats for further processing
Hardware compatibility:
Software compatibility:
- Rapid SE (only full version)
- LabView (subVI library/module)