Quartz Deposition Balance
Quartz Balance QO 40A1
The Quartz Balance QO 40A1 instrument provides a real-time, progressive indication of coating thickness during deposition, allowing the production of coatings of high accuracy and reproducibility.
The thickness of both evaporated and sputter coated films can be monitored. The sensor head is a water cooled, non-magnetic housing which is permanently positioned in the vacuum system. The crystal face is parallel to the water cooling feedthrough pipes.
The Quartz balance QO 40A1 is mounted on a DN 40CF flange with two Ø6 pipes and Microdot S-50 coaxial connector. Customized insertion length 130 - 500 mm (other on request).Request a quotation or further information
Other Features
Features
- Water-cooled sensor head
- Easy exchangeable quartz
Options
- Customised insertion length
- With or without integrated manual/electro-pneumatic shutter
- Different quartz balance geometries on request (e.g. perpendicular head geometry)
- Linear shift
Technical Data
|
Quartz Balance QO 40A1
|
Mounting Flange
|
DN 40CF (rotatable) |
| Max. operation temperature |
up to 300°C (with water cooling) |
| Water cooling (required) |
water flow > 0.5 l/min
temperature: 20 - 30 °C
max pressure: 6 bar |
Crystal Frequency
|
4.8 - 6 MHz, 14 mm diameter (industry standard) |
Insertion Length
|
dependent on specification and geometry of the chamber |
| Bakeout temperature |
250 °C |
Software
Quartz Balance Control
Description:
Easy to use graphics interface. Measurement of frequency, rate and thickness from both channels simultaneously. User defined materials list and/or manual configuration of material density and acoustic impedance. User defined endpoint thickness, tolling factors and primary sensor type. Store and recall of user defined configurations. Graphical annotation and operations such as thickness delta, time delta, frequency rate in time and also thickness delta. Available also as .dll library with full documentation for configuration within e.g. LabView, LabWindows etc.
Hardware compatibility:
- SQM-160 Thickness Monitor
Software compatibility:
