Thin Film Thickness Rate Monitor
Thin Film Thickness Rate Monitors TM13 & TM14
The TM13 and TM14 are compact and accurate thin film thickness rate monitors comprising quartz oscillator, frequency measuring system and communication interface.
It is connected to the input element of a quartz resonator. The measurement results are transmitted via RS232 or RS485 (depending on configuration) to the master device: either a PC or TMC13 thickness rate controller.
Request a quotation or further information
Other Features
Features TM13
- Frequency Resolution: 0.1 Hz
- Number of measurements per second: 4 (fixed)
- Maximum frequency of quartz oscillator: 6 MHz
- Stability: 0.5 ppm
Features TM14
- Frequency Resolution: 0.01 Hz
- Number of measurements per second: 0.5, 1, 2, 4, 10 (selectable)
- Maximum frequency of quartz oscillator: 6 MHz
- Stability: 0.5 ppm
Remote control via TMC13 controller or PC.
