Stand-alone MBE System with fast-intro chamber
- Base pressure better than 2x10-10 mbar
- 4-axes manipulator with direct and e-beam heating up to 1200 °C and LN2 cooling
- Load lock with linear transfer for fast and easy flag style sample holders introduction . Able to store up to 6 holders.
- Process chamber contains ports for e.g. RHEED gun, ion gun, beam flux monitor, quartz balances etc.
- Replaceable bottom flange, with a dedicated lifting trolley
- Cross-contamination barriers in the processing chamber
The process chamber is equipped with additional ports for e.g. analysis instruments.