info@henniker-scientific.com | +44(0)1925 830 771

MBE Systems


Stand-alone MBE System with fast-intro chamber

Hen Scientific Compact Sputter Deposition Systems

  • Base pressure better than 2x10-10 mbar


  • 4-axes manipulator with direct and e-beam heating up to 1200 °C and LN2 cooling


  • Load lock with linear transfer for fast and easy flag style sample holders introduction

. Able to store up to 6 holders.
  • Process chamber contains ports for e.g. RHEED gun, ion gun, beam flux monitor, quartz balances etc.
  • Replaceable bottom flange, with a dedicated lifting trolley
  • Cross-contamination barriers in the processing chamber

The process chamber is equipped with additional ports for e.g. analysis instruments.

 

 

 

 

Request a quotation or further information


info@henniker-scientific.com 
+44(0)1925 830 771