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MBE Systems

Stand-alone MBE System with fast-intro chamber

Hen Scientific Compact Sputter Deposition Systems

  • Base pressure better than 2x10-10 mbar

  • 4-axes manipulator with direct and e-beam heating up to 1200 °C and LN2 cooling

  • Load lock with linear transfer for fast and easy flag style sample holders introduction

. Able to store up to 6 holders.
  • Process chamber contains ports for e.g. RHEED gun, ion gun, beam flux monitor, quartz balances etc.
  • Replaceable bottom flange, with a dedicated lifting trolley
  • Cross-contamination barriers in the processing chamber

The process chamber is equipped with additional ports for e.g. analysis instruments.





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+44(0)1925 830 771