Multi-Technique Deposition Systems
Multi-Technique Deposition Systems
The system shown here is one example of a Prevac designed MBE multi-chamber growth system for metallic multi-layers. It features in-situ characterisation of sample magnetic properties, topography and crystallography. Standard option configurations are also available for other materials incuding organics and topological insulators for example and combinations that include PLD and sputtering modules are also common.
- 10-11 mbar vacuum level
- Semi-automatic transfer of 3" sample holders and smaller samples
- 1400°C Heating of 3" sample holders in MBE chamber
- 1700°C EB heating of smaller holders in the preparation chamber
- MBE E-guns with closed loop control by RGA
- Full software control of the MBE process
- Ion assist prep chamber with 25 kV ion source with differential pumping
- Low vibration design of the system, especially for SPM and MOKE
- Independent intro for tips and samples for SPM
- UHV Kerr effect analysis chamber
- All process chambers with thermocouple and pyrometer temperature control
- LCD visualisation of complete system status
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Other Features
The system consists of:
- MBE chamber. Equipped with E-guns for 12 materials and 8 effusion cells. With in situ RHEED system. Deposition processes are fully software programmed and controlled via PLC controller. The chamber is equipped with powerful pumping system including cryo-panels. Samples can be heated up to 1400°C
- Radial distribution chamber. Semi-automatic transfer/distribution for reliable movement of up to 3" sample holders between preparation and characterisation chambers.
- Preparation chamber with LEED optics and both direct and e-beam heating (up to 1700°C for small samples)
- Preparation chamber with high energy ion source for sample etching, preparation and structure modification
- MOKE characterisation chamber, for in-situ Kerr effect measurements
- Integrated SPM chamber with additional tip and sample loading system
- Additional chambers for sample introduction and storage
