1-2 axes MBE Manipulators
The 1-2 axes motorised MBE manipulator is a high rigidity UHV specimen manipulator of modular construction, suitable for a range of R1 motorised continuous substrate rotation and Z translation.
It is prepared to heat the substrate up to 1400°C (EB heating, UHV conditions) with accuracy +/- 1°C. The station includes the substrate (standard up to 6-inch sample holder) positioner and allows precise angular position of the substrate in relation to linear shutter.
The 1-2 axes motorised MBE manipulator is designed for MBE applications under ultra-high vacuum conditions. Heating is performed by resistive or EB methods. The manipulator can work in the vertical orientation.
Manipulator for MBE applications:
▪ sample holders: generally plate style
▪ prepared for reaching high temperature
▪ base pressure: 10-11 mbar