1-2 axes MBE Manipulators

The 1-2 axes motorised MBE manipulator is a high rigidity UHV specimen manipulator of modular construction, suitable for a range of R1 motorised continuous substrate rotation and Z translation.

It is prepared to heat the substrate up to 1400°C (EB heating, UHV conditions) with accuracy +/- 1°C. The station includes the substrate (standard up to 6-inch sample holder) positioner and allows precise angular position of the substrate in relation to linear shutter.

Application

The 1-2 axes motorised MBE manipulator is designed for MBE applications under ultra-high vacuum conditions. Heating is performed by resistive or EB methods. The manipulator can work in the vertical orientation.

Manipulator for MBE applications:

▪ sample holders: generally plate style
▪ prepared for reaching high temperature
▪ base pressure: 10^-11 mbar

Request a quotation or further information

Other Features

Options

H_²O shroud
LN₂ or H₂O cooling
Side or integrated wedge shutter (possible with H₂O cooling option)
XY movement stage
Shutter on/off

Technical Data

1-2 axes motorised MBE manipulator
Standard base flange	DN 100CF to DN 300CF (depending on the sample size, other on request)
Base pressure range	10^-11 mbar
Shutter	Integrated or external, pneumatic or manual
Heating methods	Resistive, EB
Substrate temperature	up to 1200 °C (resistive) up to 1400 °C (EB)
Cooling method	LN₂, H₂0
Z range	50 mm (other on request)
Positional control	Handwheel/motorised*
Resolution (manual/motorised)	500 μm / standard 10 μm
R1 range	360° continuous
Positional control	Motorised*
XY range (option)	± 12.5 mm
Positional control	Micrometer/motorised*
Resolution (manual/motorised)	5 μm / 1 μm
Max Speed	up to 60 rpm
Bakeout temperature	up to 150 °C / 200 °C (on request)
* stepper motor or servo motor - depends on the application. The manipulator can be prepared for custom motors or drivers - on request.
HEATER MATERIALS
Graphite	flexible (stable in form), minimal outgassing at the high temperatures, oxidation resistant below 500°C
Graphite + PBN coating	flexible (stable in form), minimal outgassing at the high temperatures, oxidation resistant below 800°C (depends on partial pressure of oxygen)
Graphite + SiC coating	hard, light and stable in form, oxidation resistant below 1400°C
SiC solid (β)	extremely hard, light and stable in form, low thermal expansion, durable to mechanical and electrical shocking, excellent resistance to reactive gases/oxidation

1-2 axes MBE Manipulators