info@henniker-scientific.com | +44(0)1925 830 771

1-4 axes Sputtering Manipulators


1-4 axes Sputtering Manipulators

Modular, motorised manipulators, suitable for a range of R1 continuous substrate rotation and Z translation (additionally can be equipped with XY movement module).

It is prepared to heat the substrate up to 1000°C with accuracy +/- 1°C. The station includes the substrate (standard up to 6-inch sample holder) positioner and allows precise angular position of the substrate in relation to linear shutter.

Application

The 1-4 axes motorised sputtering manipulator is designed for sputter deposition applications under ultra-high vacuum conditions, and for reactive sputtering. Heating is performed by resistive method. The manipulator can work in the vertical orientation.

Manipulator for MBE applications:

  • Sample holders: plate style, PTS
  • Base pressure: 10-9 mbar (working pressure: ~10-2 mbar)

Heater materials

The heater material is optimally adapted depending on the customer's requirements and the specific conditions of the deposition process (e.g. heating temperature, presence of reactive gases).

Example heater materials: thermocoax, graphite coated with SiC, SiC solid (β).

  • Henniker Scientific 1-4 axes Sputtering Manipulators
  • Henniker Scientific 1-4 axes Sputtering Manipulators 2
  • Henniker Scientific 1-4 axes Sputtering Manipulators
  • Henniker Scientific 1-4 axes Sputtering Manipulators 2

Request a quotation or further information


info@henniker-scientific.com 
+44(0)1925 830 771