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Pulsed DC Magnetron Power Supply


Pulsed DC Magnetron Power Supply PPS20

The PPS20 is a versatile dual source power supply combining DC and PulseDC operating modes available for R&D coating & cleaning applications. It can control up to two sources which may be any combination of compact magnetron sputter heads or glow discharge heads. Sputter sources can even be positioned in separate chambers.

The PPS20 is only 2U height and also features a vacuum gauge interlock. It can be used as a standalone table-top device or rack-mounted.
Remote control is possible via RS232, RS485 or LAN/Ethernet interface and a remote mobile application are currently under development. This unique future allows the user to observe the plasma whilst adjusting the source parameters with a handheld mobile device.
Low-Ripple Noise Technology, the elimination of high-voltage transistor switching using resonant converter technology and current-diversion circuits, results in superior reliability as well as excellent process performance in the form of high output-voltage consistency.
Arc Detection and Suppression are guaranteed by a fast response loop in less than 2 us.
Applications
  • Coating for moulds and tools
  • Semiconductor wafer sputtering
  • Oxide TFT LCD & Colour filter
  • TFT LCD
  • OLED LTPS sputter metal & TCO deposition
  • Thin film for solar cells
  • ITO deposition for touch panels
  • BIPV, data storage, FCCL
  • Automotive wheels and head lamps
  • Ion nitriding
  • Mobile phone cases
  • Pulse Magnetron Power Supply PPS20
  • Pulse Magnetron Power Supply PPS20 Software
  • PPS20 PowerCurve1
  • Pulse Magnetron Power Supply PPS20
  • Pulse Magnetron Power Supply PPS20 Software
  • PPS20 PowerCurve1

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info@henniker-scientific.com 
+44(0)1925 830 771