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Thin Film Deposition Rate Controller


TMC13 Thin Film Deposition Rate Controller

The TMC13 thin film deposisiton rate controller is the most advanced and user friendly unit for monitoring and controlling thin film deposition processes. Up to six channel inputs and two additional vacuum gauge channels together with 7" TFT display are just some of the unique features of this compact unit. A handy front panel USB slot allows storage of video files which can be played back instantly and the unit comes supplied with a variety for e.g. quartz crystal change procedures etc.

Sensor inputs can be assigned to different materials with individual parameters as well. High speed and high accuracy measuring process controlled by DSP processor improves the film quality and repeatability. It brings also the features of accuracy, stability and instrument configuration.

  • TMC13 Thin Film  Deposition Rate Controller
  • TMC13 Thin Film  Deposition Rate Controller 2D Graph
  • TMC13 Thin Film  Deposition Rate Controller
  • TMC13 Thin Film  Deposition Rate Controller 2D Graph

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Other Features

  • Six channels for quartz balance
  • 7" TFT touch panel display
  • intuitive & multilanguage interface
  • compact design
  • two inputs for most active vacuum gauges
  • up to 8 shutters and I/O reprogrammable
  • relay outputs
  • two reprogrammable analog outputs for rate and thickness monitoring with 16 bits resolution
  • communication interfaces: RS232/485, EtherNet IP
  • industry standard 6 MHz Crystal
  • frequency resolution: 0.1 Hz (for TM13) or 0.01 Hz (for TM14)
  • Rapid SE and LabVIEW libraries
  • operation of up to two multi-crystal sensor heads (pneumatic or stepper motor)
  • 2D real time chart module (option)
  • operation of up to two multi-crystal sensor heads (pneumatic or stepper motor)
  • 19” rack mounting or stand-alone
  • one-touch material change
  • favourites list for frequently used materials
  • one-touch units change
  • save individual user profile
  • built-in video tutorials

info@henniker-scientific.com 
+44(0)1925 830 771